๐”– Bobbio Scriptorium
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Themed Issue: Applications of Novel Spectroscopic Techniques to Pharmaceutical Systems

โœ Scribed by Professor David S. Jones; Professor Thomas Rades

Book ID
111770646
Publisher
Pharmaceutical Press
Year
2007
Tongue
English
Weight
92 KB
Volume
59
Category
Article
ISSN
2042-7158

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๐Ÿ“œ SIMILAR VOLUMES

Novel charge neutralization techniques a
Novel charge neutralization techniques applicable to wide current range of FIB processing in FIB-SEM combined system
โœ Hirotaka Komoda; Masaaki Yoshida; Yoh Yamamoto; Kouji Iwasaki; Ikuko Nakatani; H ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 513 KB

FIB-induced charging is one of the most critical issues for achieving successful circuit modifications of LSI. We have developed novel charge neutralization techniques applicable to a wide current range (from pico to nanoampere-order) of FIB processing in a FIB-SEM combined system. The method utiliz