✦ LIBER ✦
The use of X-ray diffraction to study defects occurring during silicon-device manufacture : J. C. Henderson and Mary A. Halliwell, P. O. Engs' J., Vol. 59, Part 2, July (1966), p. 94
- Publisher
- Elsevier Science
- Year
- 1967
- Tongue
- English
- Weight
- 213 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0026-2714
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