The use of four-point probe sheet resistance measurements for characterizing low dose ion implantation

✍ Scribed by Alan K. Smith; David S. Perloff; Rob Edwards; Rob Kleppinger; Michael D. Rigik

• Book ID: 113277355
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 625 KB
• Volume: 6
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(85)90661-5