✦ LIBER ✦
The use of diffusion pumps for obtaining ultraclean vacuum environments: D J Santeler,J Vac Sci Technol, 8 (1), Jan/Feb 1971, 299–307
- Publisher
- Elsevier Science
- Year
- 1971
- Tongue
- English
- Weight
- 148 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0042-207X
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