✦ LIBER ✦
The use of a simulation, a hybrid Taguchi, and dual response surface methods in the automated material handling system tool-to-tool strategy for a 300-mm fab
✍ Scribed by Yang, Taho; Shen, Yu An; Cho, Chiwoon; Lin, Yu Ru
- Book ID
- 121276764
- Publisher
- Inderscience Publishers
- Year
- 2012
- Tongue
- English
- Weight
- 549 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1751-5254
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