New application for the calibration of s
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Heyde, Markus; Sturm, Heinz; Rademann, Klaus
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Article
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1999
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John Wiley and Sons
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English
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Scanners for scanning probe microscopy (SPM) are generally built of piezos, which are used to move the sample with respect to the tip in the x-, y-or z-direction or vice versa. Piezoelectric scanners are usually height calibrated by the manufacturer with laser interferometry, with a calibration grid