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The temporal evolution of the negative ion density in a low duty cycle pulsed reactive magnetron discharge

โœ Scribed by S.D. You; R. Dodd; A. Edwards; J.W. Bradley


Book ID
113919471
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
290 KB
Volume
205
Category
Article
ISSN
0257-8972

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