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The techniques and applications of high rate sputtering : G. N. Jackson. Proc. Internepcon. (Microelectron.) p. 30 (Oct. 1975)

Publisher: Elsevier Science
Year: 1977
Tongue: English
Weight: 128 KB
Volume: 16
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(77)90397-3

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📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 128 KB