✦ LIBER ✦
The system for depositing hard diamond-like films onto complex-shaped machine elements in an r.f. arc plasma
✍ Scribed by S. Mitura; Z. Haś; V. Gorokhovsky
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 425 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0257-8972
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