✦ LIBER ✦

The surface transient in Si for SIMS with oblique low-energy O2+ beams

✍ Scribed by Jiang, Z. X.; Alkemade, P. F. A.

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 148 KB
Volume: 27
Category: Article
ISSN: 0142-2421
DOI: 10.1002/(sici)1096-9918(199903)27:3<125::aid-sia490>3.0.co;2-8

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✦ Synopsis

z tr etration depth of the primary ions.

In addition, the thickness of the native oxide of Si wafers was measured as a function of the storage time in air. It varied from 0.6 nm after 1 day to 1.5 nm after 2 years.

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Differential elastic scattering and back

Differential elastic scattering and backscattering cross sections of H, Si and O in the low energy (2–50 eV) range for electron spectroscopy on porous Si

✍ G Gergely; A Konkol; A Jablonski 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 349 KB

Oxygen interaction of CdS-based gas sens

Oxygen interaction of CdS-based gas sensors with different stoichiometric compositions was studied by X-ray photoelectron spectroscopy (XPS) and thermal-desorption mass spectroscopy observations combined with conductivity measurements. Three different types of film with different atomic ratios of Cd/S were used in the study of oxygen chemisorption in a low-temperature range between 300 and 570 K. Spray pyrolysis was used for the deposition of the films on glass substrates; XPS and energy dispersive spectroscopy of X-ray together with atomic force microscopy and scanning electron microscopy were used for the characterization of the composition and structure of the films. It was possible to distinguish different temperature ranges for the thermal desorption of the different adsorbed oxygen species. A comparison of the data from XPS and mass-spectroscopy observations with conductance measurements allows to conclude that metallic surface atoms are responsible for different interactions of oxygen species with CdS surfaces.

📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 379 KB