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The structures and properties of hydrogen silsesquioxane (HSQ) films produced by thermal curing

โœ Scribed by Yang, Chang-Chung; Chen, Wen-Chang

Book ID
121199771
Publisher
Royal Society of Chemistry
Year
2002
Tongue
English
Weight
281 KB
Volume
12
Category
Article
ISSN
0959-9428

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Structural control and properties of low-dielectric-constant poly(hydrogen silsesquioxane) precursors and their thin films
โœ Wei-Chih Liu; Yang-Yen Yu; Wen-Chang Chen ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 118 KB ๐Ÿ‘ 2 views

## Abstract The precursors of poly(hydrogen silsesquioxane) (PHSSQ) were synthesized from triethoxysilane (TES) through variations in the pH and molar ratio of water to TES (__R__~1~). The molecular structures of the prepared PHSSQ precursors were controlled by the reaction conditions, including th