The structure-mechanical property relationship of amorphous silicon monoxide thin films: R W Hoffman Jr et al, Thin Solid Films, 154, 1987, 149–157

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 154 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90373-4