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The stress distribution and curvature of a general compositionally graded semiconductor layer

✍ Scribed by L.B. Freud


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
382 KB
Volume
132
Category
Article
ISSN
0022-0248

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A systematic theoretical analysis is presented of the combined effects of substrate compliance and film compositional grading on the relaxation of strain due to lattice mismatch in layer-by-layer semiconductor heteroepitaxy. The analysis is based on a combination of continuum elasticity theory and a