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The simulation of epitaxy, sublimation, and annealing processes in a 3D silicon surface layer

โœ Scribed by A. V. Zverev; I. G. Neizvestnyi; N. L. Shvarts; Z. Sh. Yanovitskaya


Book ID
110128017
Publisher
Springer
Year
2001
Tongue
English
Weight
242 KB
Volume
35
Category
Article
ISSN
1063-7826

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