The Silicon Nitride Film Formed by ECR-CVD for GaN-Based LED Passivation

✍ Scribed by Chang, K.M. ;Lang, C.C. ;Cheng, C.C.

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 77 KB
• Volume: 188
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200111)188:1<175::aid-pssa175>3.0.co;2-h