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The role of the negatively charged (Si3−Si−F2)−complexes in interactions of fluorine with the (111) surface of silicon

✍ Scribed by M. R. Baklanov; A. A. Karpushin; K. P. Moginikov; A. N. Sorokin

Book ID: 110563772
Publisher: SP MAIK Nauka/Interperiodica
Year: 1996
Tongue: English
Weight: 436 KB
Volume: 37
Category: Article
ISSN: 0022-4766
DOI: 10.1007/bf02578566

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