The surface conductivity of the samples with AurSi 100 , NarSi 100 and HrSi 100 surface phases was measured in ultra-high vacuum by four-point probe method at RT. We have found that difference in surface conductivity of the silicon ลฝ . ลฝ . ## y5 y1 ลฝ . ลฝ . substrate with surface phase and clean S
โฆ LIBER โฆ
The role of surface phases in processes on silicon surfaces
โ Scribed by V.G. Lifshits; V.B. Akilov; B.K. Churusov; Yu.L. Gavriljuk
- Publisher
- Elsevier Science
- Year
- 1989
- Weight
- 43 KB
- Volume
- 222
- Category
- Article
- ISSN
- 0167-2584
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