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The Role of Oxygen Dissociation in Plasma Enhanced Chemical Vapor Deposition of Zinc Oxide from Oxygen and Diethyl Zinc

✍ Scribed by Colin A. Wolden

Publisher: Springer
Year: 2005
Tongue: English
Weight: 264 KB
Volume: 25
Category: Article
ISSN: 0272-4324
DOI: 10.1007/s11090-004-8841-6

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