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The role of ion implantation in industrial sputtering processes for tribological applications

✍ Scribed by Franz-Josef Körber

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 468 KB
Volume: 74-75
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)08362-6

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