๐”– Bobbio Scriptorium
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The role of electron beam in display devices

โœ Scribed by Osamu Konosu


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
656 KB
Volume
363
Category
Article
ISSN
0168-9002

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The effects of electron beam irradiation damage has been investigated in Si/SiGe heterostructures. The damage to SiGe two-dimensional hole gases (2DHGs) was measured as a function of accelerating voltage and electron dose. For 40 keV electrons at a dose of 2 C m -2 (typical PMMA resist values), the