✦ LIBER ✦
The role of antiphase domain boundaries in Si epitaxy by ultrahigh vacuum chemical vapor deposition from SiH 4 or SiH 2 Cl 2 on Si(100)-(2×1)
✍ Scribed by Spitzmüller, J.; Fehrenbacher, M.; Haug, F.; Rauscher, H.; Behm, R.J.
- Book ID
- 113035398
- Publisher
- Springer
- Year
- 1998
- Tongue
- English
- Weight
- 460 KB
- Volume
- 66
- Category
- Article
- ISSN
- 1432-0630
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