✦ LIBER ✦
The restoration of porous methylsilsesquioxane (p-MSQ) films using trimethylhalosilanes dissolved in supercritical carbon dioxide
✍ Scribed by Bo Xie; Anthony J. Muscat
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 173 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0167-9317
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