✦ LIBER ✦
The removal of deformed submicron particles from silicon wafers by spin rinse and megasonics
✍ Scribed by Fan Zhang; Ahmed A. Busnaina; Michael A. Fury; Shi-Qing Wang
- Book ID
- 107452494
- Publisher
- Springer US
- Year
- 2000
- Tongue
- English
- Weight
- 207 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0361-5235
No coin nor oath required. For personal study only.