✦ LIBER ✦
The relationship between residual stress, X-ray elastic constants and lattice parameters in TiN films made by physical vapor deposition
✍ Scribed by A.J. Perry
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 399 KB
- Volume
- 170
- Category
- Article
- ISSN
- 0040-6090
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