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The rate of chemical vapor deposition of TiC

โœ Scribed by K.G. Stjernberg; H. Gass; H.E. Hintermann

Book ID
103421748
Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
337 KB
Volume
40
Category
Article
ISSN
0040-6090

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Preparation of micro-coiled TiC fibers b
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โœ S. Motojima; H. Iwanaga ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 319 KB

Micro-coiled TiC fibers have been directly prepared on a graphite substrate from TiC14 + H 2 + PCI 3 gas mixtures at 1050 ยฐC by the Si + Pd mixed impurity-activated CVD process. It was found that the presence of small amounts of PCI 3 in the source gas as well as Si + Pd mixed impurities were indisp