The quadratic finite element thermal analysis of silicon irradiated by a pulsed KrF excimer laser

✍ Scribed by Toshiyuki Nakamiya; Tomoaki Ikegami; Kenji Ebihara

• Book ID: 117626422
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 134 KB
• Volume: 17
• Category: Article
• ISSN: 0927-0256
• DOI: 10.1016/s0927-0256(00)00062-8