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The pure-shear mode solidly mounted resonator based on c-axis oriented ZnO film

โœ Scribed by Da Chen; Jingjing Wang; Yan Xu; Dehua Li; Zhaoxin Li; Hongwei Song

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
447 KB
Volume
256
Category
Article
ISSN
0169-4332

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Solidly mounted resonators operated in t
Solidly mounted resonators operated in thickness shear mode based on c-axis oriented AlN films
โœ Da Chen; Jingjing Wang; Dehua Li; Yan Xu; Zhaoxin Li ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 1009 KB

We fabricated the solidly mounted resonators operated in thickness shear mode using lateral field excitation. The resonators are consisted of the electrodes parallel to the film surface, the c-axis oriented AlN film and the Bragg reflector of SiO 2 /AlN. In order to design the electrode frame, the e