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The problem of β-SiC formation on surface of silicon substrates annealed in high vacuum: O Kuznetsov, Proc Rost Krist Plen Polup, Novosibirsk 1970, 226–231 (in Russian)


Publisher
Elsevier Science
Year
1971
Tongue
English
Weight
122 KB
Volume
21
Category
Article
ISSN
0042-207X

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