The preparation and characterization of transition metal nitride films: P T Dawson and S A J Stazky,J Vac Sci Technol, 20 (4), 1982, 966–967

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 164 KB
• Volume: 35
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(85)90293-3