✦ LIBER ✦
The post-annealing temperature dependences of electrical properties and surface morphologies for arsenic ion-implanted 4H-SiC at high temperature
✍ Scribed by J Senzaki; K Fukuda; S Imai; Y Tanaka; N Kobayashi; H Tanoue; H Okushi; K Arai
- Book ID
- 108416172
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 226 KB
- Volume
- 159-160
- Category
- Article
- ISSN
- 0169-4332
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