✦ LIBER ✦
The physics of plasma-enhanced chemical vapour deposition for large-area coating: industrial application to flat panel displays and solar cells
✍ Scribed by Perrin, Jérôme; Schmitt, Jacques; Hollenstein, Christoph; Howling, Alan; Sansonnens, Laurent
- Book ID
- 120254564
- Publisher
- Institute of Physics
- Year
- 2000
- Tongue
- English
- Weight
- 291 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0741-3335
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