The performance of the dry roots pump “DRYMAC” in LP-CVD silicon nitride process

✍ Scribed by Kanke, Yukio; Tanaka, Tomonari; Aikawa, Junichi; Yuyama, Junpei

• Book ID: 108416354
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 261 KB
• Volume: 169-170
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(00)00790-x