✦ LIBER ✦
The oxidation of PtSi, Pt2Si and polycrystalline silicon in ultrahigh vacuum residual gas: H C Swart et al, Thin Solid Films, 158, 1988, 61–67
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 158 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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