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The origin of contrast in the imaging of doped areas in silicon by slow electrons

✍ Scribed by Frank, Ludek; Mullerova, Ilona; Valdaitsev, Dimitrii A.; Gloskovskii, Andrei; Nepijko, Sergei A.; Elmers, Hans-Joachim; Schonhense, Gerd


Book ID
118059490
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
457 KB
Volume
100
Category
Article
ISSN
0021-8979

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