The operation and performance of an r.f. diode sputtering system in relation to its use as a research facility : G. R. Witt. Vacuum 21 (1971), p. 581

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 111 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90462-3