The neon gas field ion source—a first characterization of neon nanomachining properties

✍ Scribed by Richard H. Livengood; Shida Tan; Roy Hallstein; John Notte; Shawn McVey; F.H.M. Faridur Rahman

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 968 KB
• Volume: 645
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2010.12.220