The nature of the dominant deep trap in amorphous silicon nitride films: Evidence for a negative correlation energy

✍ Scribed by P.M. Lenahan; D.T. Krick; J. Kanicki

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 604 KB
• Volume: 39
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(89)90456-x