✦ LIBER ✦
The modeling of plasma etching processes using response surface methodology : Mary W. Jenkins, Michael T. Mocella, Kenneth D. Allen and Herbert H. Sawin. Solid St. Technol., 175 (April 1986)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 121 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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