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The microstructure of CVD κ-Al2O3 multilayers separated by thin intermediate TiN or TiC layers

✍ Scribed by M. Halvarsson; J.E. Trancik; S. Ruppi

Book ID: 113656256
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 608 KB
Volume: 24
Category: Article
ISSN: 0263-4368
DOI: 10.1016/j.ijrmhm.2005.06.007

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