The microstructure and some related electrical properties of tantalum films: N J Maskalicket al, Trans 10 AVS Nat Vac Symp, MacMillan &Co, 1963, p 503.

• Publisher: Elsevier Science
• Year: 1965
• Tongue: English
• Weight: 153 KB
• Volume: 15
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(65)91543-5