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The microhardness, electrical conductivity and temperature coefficient of resistance of reactively sputtered TiCxOyNz films

✍ Scribed by H. Fark; J. Chevallier; K. Reichelt; H. Dimigen; H. Hübsch


Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
369 KB
Volume
100
Category
Article
ISSN
0040-6090

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