✦ LIBER ✦
The mechanism of single-step liftoff with chlorobenzene in a diazo-type resist : R. M. Halverson, M. W. Macintyre and W. T. Motsiff. IBM Jl Res. Dev.26 (5), 590 (1982)
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 103 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0026-2714
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