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The mechanism of formation and some properties of thin fluorocarbon films deposited onto silicon plates by electron-beam polymerization of hexafluoropropylene from the vapor phase

✍ Scribed by M. A. Bruk; E. N. Zhikharev; I. A. Volegova; A. V. Spirin; N. V. Kozlova; E. N. Teleshov; V. A. Kal’nov


Book ID
111469247
Publisher
SP MAIK Nauka/Interperiodica
Year
2010
Tongue
English
Weight
240 KB
Volume
52
Category
Article
ISSN
1560-0904

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