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The mechanism of field-assisted silicon-glass Bonding

✍ Scribed by Yozo Kanda; Kazunori Matsuda; Chizuko Murayama; Junko Sugaya

Book ID: 118414990
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 404 KB
Volume: 23
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(90)87064-p

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