The mechanism of alumina formation from TMA and molecular oxygen using catalytic-CVD with an iridium catalyzer

✍ Scribed by Yoh-Ichiro Ogita; Toshiyuki Tomita

• Book ID: 108288936
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 127 KB
• Volume: 501
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2005.07.103