✦ LIBER ✦
The linkage between macroscopic gettering mechanisms and electronic configuration of 3d-elements in p/p+ epitaxial silicon wafers
✍ Scribed by R. Hölzl; L. Fabry; K.J. Range
- Publisher
- Springer
- Year
- 2002
- Tongue
- English
- Weight
- 131 KB
- Volume
- 74
- Category
- Article
- ISSN
- 1432-0630
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