✦ LIBER ✦
The link between nanoscale feature development in a negative resist and the Hansen solubility sphere
✍ Scribed by Deirdre L. Olynick; Paul D. Ashby; Mark D. Lewis; Timothy Jen; Haoren Lu; J. Alexander Liddle; Weilun Chao
- Book ID
- 105339219
- Publisher
- John Wiley and Sons
- Year
- 2009
- Tongue
- English
- Weight
- 502 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0887-6266
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