The irradiation effect of MeV protons on diamond-like carbon films
β Scribed by Tianmin Wang; Weijie Wang; Buliang Chen
- Book ID
- 113282788
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 351 KB
- Volume
- 71
- Category
- Article
- ISSN
- 0168-583X
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Ion irradiation effects on diamond and diamond like carbon (DLC) films have attracted great interest in recent years. DLC films contain varying amounts of hydrogen attached to carbon. Irradiation leads to hydrogen loss, increase or decrease of both sp3 and sp' bonded sites, changes in bond angle dis
Pulsed KrF excimer laser is used to deposit tetrahedral amorphous carbon (ta-C) thin films on Si (1 1 1) single crystal substrates at room temperature under vacuum $10 Γ6 mbars. The pristine deposited films are then irradiated by 4 MeV electron beam at doses varying from 1000 to 4000 cGy. Analysis t