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The infrared transmission and reflectance spectra of silicon nitride films obtained in a high-frequency discharge plasma

โœ Scribed by Yu. I. Prokhorov; V. A. Sologub; B. A. Sukhodaev


Publisher
Springer US
Year
1973
Tongue
English
Weight
283 KB
Volume
19
Category
Article
ISSN
0021-9037

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