The infrared transmission and reflectance spectra of silicon nitride films obtained in a high-frequency discharge plasma

✍ Scribed by Yu. I. Prokhorov; V. A. Sologub; B. A. Sukhodaev

• Publisher: Springer US
• Year: 1973
• Tongue: English
• Weight: 283 KB
• Volume: 19
• Category: Article
• ISSN: 0021-9037
• DOI: 10.1007/bf00614591