✦ LIBER ✦
The influence of TiN ARC thickness on stress-induced void formation in tungsten-plug vias
✍ Scribed by Walls, J.A.
- Book ID
- 114537080
- Publisher
- IEEE
- Year
- 1997
- Tongue
- English
- Weight
- 156 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0018-9383
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